The high vacuum diaphragm valve uses the valve stem to directly press the rubber membrane on the valve seat to cut off or connect the vacuum system. The applicable working medium of the high vacuum diaphragm valve is air and non-corrosive gas. The high vacuum diaphragm valve is used in the vacuum system to cut off or connect the air flow.

Application range of high vacuum diaphragm valve: 10 5 ～1.3×10 -4 Pa
Leakage rate of high vacuum diaphragm valve: 6.7×10 -4 Pa.L/S
Medium temperature of high vacuum diaphragm valve:
When the high vacuum diaphragm valve diaphragm is nitrile rubber, -25℃～+80℃
When the diaphragm is fluorine rubber -30℃～＋150℃